The precise temperature control in semiconductor manufacturing is undergoing a silent compliance reshuffle. As the phase-out of traditional fluorocarbon refrigerants approaches its deadline, every semiconductor factory is faced with the same choice: to continue using the transitional solution, or to directly switch to the long-term compliant route?

Lingheng Industry's answer is the latter. We use the natural refrigerant CO2 as the coolant and have launched the Green series Chiller specifically tailored for Chinese semiconductor customers - not a concept product, but a mature solution that has entered mass production and is ready for delivery.

Refrigerant phase-out timeline: There is little time left for transitional solutions.

Let's first take a look at several key time points:

R404A / R507：It has been eliminated from the Chinese and European markets; R410A: China has explicitly prohibited production by 2029, and the European Union has explicitly stated that as of January 1, 2025, it will ban the use of any fluorinated greenhouse gases with a Global Warming Potential (GWP) value of 750 or above.

This means that if one still opts for traditional fluorine-containing refrigerants when building new production lines or upgrading old equipment, the date of equipment commissioning will almost coincide with the start of the renovation process. <span style="color:#438a2f;" The refrigerant choice for the Lingheng Green series Chillers is very clear: the natural working fluid CO₂, with a GWP of 1 and an ODP of 0. It is not on any list of elimination.

The verified technical route

The confidence behind this choice is partly derived from the practical experience of industry pioneers.

In 2019, TSMC was the first to introduce CO₂ Chillers in its advanced manufacturing lines. The decision-making logic was clear and pragmatic: replacing the traditional solution with a refrigerant with a GWP of 1 to control CXF pollution, ensure yield, and avoid long-term operational costs such as annual legal leak checks and refrigerant recovery. <span style="color: #438a2f;" More than five years of large-scale operation have verified the maturity of the CO₂ transcritical cycle technology.

The Lingheng Green series is based on the same mature technical framework. It has been specially redeveloped to meet the power supply standards, supply and return water temperatures, and space layout requirements of Chinese Fab plants. What we deliver is a reliable equipment that can be put into use immediately.

Lingheng CO₂ Chiller: Three Design Aspects to Note

✅ ±0.1℃Temperature control, ranging from -40℃ to 90℃

The main model GVS010-W-32F can stably output 2kW cooling capacity at -20℃, with temperature control accuracy locked at ±0.1℃. For critical processes such as etching, the temperature control fluctuation directly affects yield. If the process requires more extreme cooling, the cryogenic model GVS405-W-32F can provide 4kW cooling capacity at -40℃.

✅ Energy efficiency has been improved by more than 30%

Behind this is the self-developed DCC dynamic cross-critical control technology - sensing the outlet status of the gas cooler in milliseconds, and dynamically adjusting the coordination of the expansion valve, the refilling circuit and the rotational speed of the compressor. According to estimates, for a Fab with a monthly production capacity of 100,000 pieces, the annual electricity savings achieved through this technology can reach several million yuan.

✅ More than 80% of VCR connectors

To reduce the risk of micro-leakage of refrigerant in the physical structure, we extensively use welding and VCR connectors instead of threads and ferrules at key connection points of the piping system, and conduct a full system leak detection with high-precision gas detectors before the products are manufactured. This directly affects the CXF contamination control in the clean room and the yield of wafers.

When the compliant gates slowly close, the choice lies with those who have made adequate preparations in advance. Lingheng Industrial's CO₂ Chiller offers a comprehensive and long-term compliant solution for precise temperature control in semiconductor production lines.