半导体温控设备 半导体温控设备

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Precision heating jacket system

HEATING JACKET SYSTEM

For semiconductor equipment, special gas transportation, exhaust gas treatment and ALD processes

Provide precise temperature control solutions

  • 温度范围25-220°C

    Temperature range
    25-220°C

  • 湿度均匀性≤10%

    Humidity uniformity
    ≤10%

  • 25-洁净等圾ISO14644-1 Class5

    Clean garbage
    ISO14644-1 Class5

  • 支持定制OEM

    Support customization
    OEM

Heated jacket

Product series

  • PTFE Heated Jacket Series

    PTFE Heating Jacket Series
    PTFE Glass fiber heat jacket

    PTFE Glass Fiber Heating Jacket

    Expanding material PTFE Heated jacket

    Expanded PTFE Heating Jacket

    Aerogel heating jacket

    Aerogel Heating Jacket

    PTFE 加热夹克系列

    Extremely resistant to cavitation erosion|Prevent crystallization blockage|Applicable toFab Environment

  • Silicone heater series

    Silicone Heater Series
    Silicone gas pipeline heater

    Silicone Gas Line Heater

    Silicone-coated spiral heater

    Silicone Wrap-around Heater

    Silicone patch-type heater

    Silicone Patch Heater

    Silicone rubber heater

    Silicone Rubber Heater

    Silicone heater series

    Flexible adhesion|Rapid heating up|Easy installation

  • Container Heating Series

    Vessel Heating Series
    Source bottle silicone heater

    Source Bottle Heater

    Silicone heater for gas cylinder

    Gas Cylinder Heater

    Gas cylinder heating blanket

    Cylinder Heating Blanket

    Container Heating Series

    Uniform heating|Anti-condensation|Stable vapor pressure

Technical principle

The heating jacket generates heat through nickel-chromium alloy heating wires. Combined with high-performance insulation materials, it forms a uniform heat field on the surface of the heated equipment, achieving precise temperature control, preventing condensation and crystallization, and ensuring stable process operation.

Heating layerNickel-chromium alloy electric heating wire, with stable heating performance and long service life

Insulation layerGlass fiber / silicone foam / aerogel, highly efficient insulation

Outer epidermisPTFE Coating layer / Silicone tape, corrosion-resistant, easy to clean off

Fixed methodVelcro / Four-corner fastener / Tie, easy and reliable installation

The technical principle of the heated jacket

Technical Specifications

Product typeHeating temperatureVoltageThicknessTemperature uniformityCleanlinessSurface temperatureTemperature sensorInstallation method
Fully woven glass fiber heat-resistant jacket25-200℃208V
≤10%ISO-14644-1 5grade≤65℃

Expanded fabric fiberglass heat jacket25-200℃208V
≤10%ISO-14644-1 5grade≤65℃

Silicone foam heater25-150℃208V8/10/12mm≤10%ISO-14644-1 5grade≤65℃

Silicone gas conveying pipeline heater25-200℃208V(Customizable)8/10/12/15mm≤10%ISO-14644-1 5grade≤65℃

Silicone patch-type heater25-220℃208V(Customizable)1.5mm≤10%ISO-14644-1 5grade

Paste
Silicone-coated spiral-type special gas pipeline heater25-200℃208V(Customizable)2mm≤10%ISO-14644-1 5grade

Twisting
Source bottle silicone heater25-150℃208V5/8mm±2℃(Radial)ISO-14644-1 5grade
K-type/PT100
Silicone rubber heater25-150℃208V2.5mm
ISO-14644-1 5grade
K-type/PT100
PTFEGlass fiber heater25-200℃208V
≤10%ISO-14644-1 5grade≤65℃

Aerogel heater25-200℃208V
≤10%ISO-14644-1 5grade≤65℃

Steel cylinder fiberglass heating blanket (Special Gas)25-200℃208V
≤10%ISO-14644-1 5grade≤65℃

Silicone heater for gas cylinder25-100℃208V、220V5mm、8mm
ISO-14644-1 5grade
K-type/PT100
Structural materialOuter epidermisFixed methodInsulation layerThermal insulation layer thicknessHeating layerWireInsulation layer
Fully woven glass fiber heat-resistant jacketFull weavingHigh-temperature VelcroGlass fiber insulation cotton6/10/12/15mmNickel-chromium alloy electric heating wire

Expanded fabric fiberglass heat jacketExtruded fabricHigh-temperature VelcroGlass fiber insulation cotton6/10/12/15mmNickel-chromium alloy electric heating wire

Silicone foam heaterSilicone-coated glass fiber fabricMetal buttonsWhite foamed silicone gel
Silicone band + nickel-chromium wire

Silicone gas conveying pipeline heaterSilicone bandageFour-corner fastener / VelcroFoaming silicone rubber
Heat-resistant silicone tape + nickel-chromium wire

Silicone patch-type heater



Nickel-chromium wire / heating filmPTFE cableHigh-temperature resistant silicone tape
Silicone-coated spiral-type special gas pipeline heater



Nickel-chromium wirePTFE high-temperature wireHigh-temperature resistant silicone tape
Source bottle silicone heaterStainless steelButterfly claspWhite foamed silicone gel
Teflon fabric + nickel-chromium wire

Silicone rubber heaterSilicone-coated glass fiber fabric3M double-sided adhesive (up to 100℃) and strap fixation

Nickel-chromium heating wire

PTFE glass fiber heaterPTFE Teflon coated fabricHigh-temperature VelcroGlass fiber insulation cotton6/10/12/15mmNickel-chromium alloy electric heating wire

Aerogel heaterPTFE Teflon coated fabricHigh-temperature VelcroGlass fiber aerogel6/10/12/15mmNickel-chromium alloy electric heating wire

Steel cylinder fiberglass heating blanket (Special Gas)PTFE Teflon double-sided coated fabricHigh-temperature VelcroGlass fiber insulation cotton6/10/12/15mmNickel-chromium alloy electric heating wire

Silicone heater for gas cylinder