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LIAT Ultra-low temperature chiller

Manager Hong：+86 15298871053

Company Phone：+86 400-600-7626

Company Email: lingheng@liat.cn

Company website: www.liat.cn

Address：7F, Building 2, Jiuting U World, No.178 Pu Hui Road, Jiuting Town, Songjiang District, Shanghai, China.

Factory Address: Building 6, No. 208, Changqing Road, Wujiang District, Suzhou, China

CRS Series-065

CRS Series-065

  • Category：CR Low Temperature Series
  • Sector：Suitable for multiple semiconductor manufacturing processes such as CVD, PVD, ETCH, etc.
  • Browse number：
  • Release time：2024-01-01
  • Detail

Technical Parameters

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  CRS Series Parameters
Pseudolaric acidChiller
Product ModelCRS-65
Temperature Range-50~100℃ 
Temperature control accuracy±0.1℃
Cooling Capacity16kW @ outlet 25°C, cooling water temperature 28°C
6.5kW@outlet -20°C, cooling water temperature 28°C
Coolant MediumMixed antifreeze, atmospheric pressure boiling point of 140 ℃ or more, ice power -50 ℃, car antifreeze
Flux20±0.5L/min (0.72Mpa)
Cooling MethodPCW Water cooling, external recirculation supply
RefrigerantsR404A
Circulating fluid connectionDN25
Input PowerAC 380V 3Ph 50Hz
Overall dimensions(mm)1200W X 750D X 1500H
Net weight≤500kg




Temperature control unit performance curve

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Product Effect Diagram

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Areas of application

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Manager Hong：+86 15298871053

Company Phone：+86 400-600-7626

Company Email: lingheng@liat.cn

Company website: www.liat.cn

Address：No.178,Puhui Road,Jiuting Town,Songjiang District,Shanghai,China.

Factory Address: Building 6, No. 208, Changqing Road, Wujiang District, Suzhou, China

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