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HPS Series-080

HPS Series-080

  • Category:CVD /PVD/ALD/ETCH in Wafer Production Field
  • Sector:Temperature control in temperature ranges that do not require a freezer.
  • Browse number:
  • Release time:2024-01-01
  • Detail

Product Description

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HPS series heat exchanger consists of circulation system and intelligent control system, etc..

The equipment is a single-loop circulating heat exchanger, with a control temperature range of 20-90℃, an upper limit of heat exchange capacity of 8KW, and an operating ambient temperature range of 5-35℃, with stable temperature control realized by PID. It adopts high-efficiency plate heat exchanger, which optimizes the internal circulation loop and has higher heat exchange efficiency.




Refrigeration System

Emergency stop button: stops equipment operation and alarms.

When the circulating fluid level is high: only alarm but not stop heating and heat exchange.

When the circulating fluid level is low: alarm and stop heating and heat exchange.

Over-temperature protection: alarm and stop heating when the temperature of circulating liquid in the water tank is higher than the set value.

Heat exchanger: adopts high efficiency plate heat exchanger, high heat exchange efficiency.

Heater: The use of submerged heaters allows heat to be transmitted directly to the circulating fluid, with high and more uniform heating efficiency.

Circulation pump: domestic circulation pump, high energy efficiency, low noise, optional magnetic pump.

Liquid storage tank: the main tank and auxiliary tank are designed separately to reduce the use of circulating fluid.

Display: large customized screen for easy operation. Can look up the history. Support temperature curve display/Excel table export.

Communication part: RS485 interface, Modbus RTU communication protocol. Support customized communication interface.

DI Filter: Option to maintain resistivity and filter impurities. Built-in design saves space and is reasonably located Maintenance only requires opening the side panel.

Resistivity Sensor: Optional, for displaying the resistivity of the circulating fluid.

Automatic liquid return function: optional function, can automatically recover the circulating liquid in the customer's chamber. Reduces maintenance hours and downtime. Supports customization.


Intelligent Control System

Adopting advanced PLC programmable controller, applying PID algorithm to realize precise temperature control of circulating liquid, which makes the temperature control precision higher. Touch screen human-computer interaction interface, Chinese interface, clear description of parameters, fault records can be checked, real-time temperature trend line, convenient for users to observe and easy to operate. The operation interface can be customized according to the user's needs, such as bilingual interface.

The communication adopts the standard RS485 interface and follows the standard Modbus-RTU protocol, which can transmit all kinds of data required by the user, such as the temperature of the liquid discharged, the unit failure and other information.



Technical Parameters

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HPS Series Parameters
Pseudolaric AcidHeating Exchanger
Product ModelHPS-080-W-32
Cooling capacity (w)@408kw
Tank CapacityMain tank 13L, Auxiliary tank 12L
Circulating fluid temperature range20~90℃
Ambient temperature range5~35℃
Heaters6kw
Input Power200-240v 3Ph 50Hz
Flux20L/min
Temperature control accuracy±0.2℃
Circulating FluidDI water
ConnectorRc3/4
Machine Size(mm)380W×870D×1300H
Net Weight90kg
Design StandardCE



Temperature control unit performance curve

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Product Effect Diagram

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Areas of Application

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Contact

Manager Hong:+86 15298871053

Company Phone:+86 400-600-7626

Company Email: lingheng@liat.cn

Company website: www.liat.cn

Address:No.178,Puhui Road,Jiuting Town,Songjiang District,Shanghai,China.

Factory Address: Building 6, No. 208, Changqing Road, Wujiang District, Suzhou, China

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