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HPS Series-400

HPS Series-400

  • Category:CVD /PVD/ALD/ETCH in Wafer Production Field
  • Sector:Temperature control in temperature ranges that do not require a freezer.
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  • Release time:2024-01-01
  • Detail

Product Description

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HPS series temperature control unit consists of circulation system and intelligent control system, etc..

The equipment is a single-loop circulation temperature control machine, control temperature range 20-90 ℃, refrigeration capacity upper limit of 40KW, the use of ambient temperature range of 5-35 ℃, by PID to achieve stable temperature control. It adopts high-efficiency plate heat exchanger, which optimizes the internal circulation loop and has higher heat exchange efficiency. 

Emergency stop button: stop the equipment operation and alarm 

When the circulating fluid level is high: only alarm but not stop heating and cooling.

When the circulating fluid level is low: alarm and stop heating and cooling. 

Over-temperature protection: alarm and stop heating when the temperature of circulating liquid in the water tank is higher than the set value. 

Circulating fluid recovery: Open the recovery solenoid valve and use nitrogen to purge and recover the circulating fluid.




Advantages of magnetic pumps 

No leakage: Magnetic coupling replaces the traditional mechanical seal, avoiding the problem of liquid leakage.

Less susceptible to damage: Due to the magnetic coupling, there is no direct contact between the rotor and the stator, thus reducing the risk of wear and damage.

High efficiency and energy saving: the magnetic pump has no friction loss, high operating efficiency and significant energy saving effect.

Corrosion-resistant: The inner shell material is made of corrosion-resistant material, which can convey corrosive liquid.

Safety and reliability: High safety and reliability due to no leakage, not easy to damage and other characteristics.


  Adoption of magnetic pumps




智能控制系统

Adopting advanced PLC programmable controller, applying PID algorithm to realize precise temperature control of circulating liquid, which makes the temperature control precision higher. Touch screen human-computer interaction interface, Chinese interface, clear description of parameters, fault records can be checked, real-time temperature trend line, convenient for users to observe and easy to operate. The operation interface can be customized according to the user's needs, such as bilingual interface.

The communication adopts the standard RS485 interface and follows the standard Modbus-RTU protocol, which can transmit all kinds of data required by the user, such as the temperature of the liquid discharged, the unit failure and other information.


Technical Parameters

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HPS-40-W-32 series product parameters
Pseudolaric acidHeat  Exchanger
Product ModelHPS-40-W-32
Cooling capacity (w)@40℃40kw
Temperature Range20~90℃
Heaters15kw
Input PowerAC 200-240V 3HP 50Hz
Flux45L/min
Temperature Control Accuracy±0.2℃
Refrigerant Carrier (chemistry)Deionized water/0% ethanol 60% ethylene glycol
ConnectorG1 threaded 4-part water dispenser
Machine Size(mm)500W×760D×1320H
Design StandardSEMI
Net Weight (kg)180kg
RefrigerantR404A
Total Power18kw



Temperature control unit performance curve

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Product Effect Diagram

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Areas of application

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Contact

Manager Hong:+86 15298871053

Company Phone:+86 400-600-7626

Company Email: lingheng@liat.cn

Company website: www.liat.cn

Address:No.178,Puhui Road,Jiuting Town,Songjiang District,Shanghai,China.

Factory Address: Building 6, No. 208, Changqing Road, Wujiang District, Suzhou, China

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