产品展示

产品展示

Current: Home > Products > CVD /PVD/ALD/ETCH in Wafer Production Field
HPD Series-060

HPD Series-060

  • Category:CVD /PVD/ALD/ETCH in Wafer Production Field
  • Sector:Temperature control in temperature ranges that do not require a freezer.
  • Browse number:
  • Release time:2024-01-01
  • Detail

Product Description

——


HPD series heat exchanger consists of circulation system and intelligent control system, etc..




Refrigeration System

The equipment is a double-loop circulation temperature control machine, control temperature range 20-90 ℃, cooling capacity of 6KW. the use of ambient temperature range of 5-35 ℃, by PID to achieve stable temperature control. It adopts high-efficiency plate heat exchanger, which optimizes the internal circulation loop and has higher heat exchange efficiency.

Emergency stop button: stops equipment operation and alarms.

When the circulating fluid level is high: only alarm but not stop heating and cooling.

When the circulating fluid level is low: alarm and stop heating and cooling.

Over-temperature protection: alarm and stop heating when the temperature of circulating liquid in the water tank is higher than the set value.

Condenser: adopts high-efficiency plate heat exchanger with high heat exchange efficiency.

Heater: The use of submerged heaters allows heat to be transmitted directly to the circulating fluid, with high and more uniform heating efficiency.

Expansion valve: electronic expansion valve to realize the condenser to the evaporator throttling, and at the same time control the flow of refrigerant, to ensure that the evaporator outlet refrigerant vapor superheat stability, electronic expansion valve high precision and fast response speed, so as to achieve the evaporator and good liquid supply.

Circulation pump: using DC brushless water pump, small size, long life, low power consumption.

Display: large customized screen for easy operation. Can look up the history. Support temperature curve display/Excel table export.

Communication part: RS485 interface, Modbus RTU communication protocol.


Intelligent Control System

Adopting advanced PLC programmable controller, applying PID algorithm to realize precise temperature control of circulating liquid, which makes the temperature control precision higher. Touch screen human-computer interaction interface, Chinese interface, clear description of parameters, fault records can be checked, real-time temperature trend line, convenient for users to observe and easy to operate. The operation interface can be customized according to the user's needs, such as bilingual interface.

The communication adopts the standard RS485 interface and follows the standard Modbus-RTU protocol, which can transmit all kinds of data required by the user, such as the temperature of the liquid discharged, the unit failure and other information.




Technical Parameters

——


HPD Series Parameters
Pseudolaric AcidHeat exchanger
Product ModelHPD060-W-33
Cooling MethodWater-cooled Heat Exchanger
Control MethodPID Control
Temperature Control Accuracy土0.5℃
Cooling Capacity6kw
Add Heat2kw
Flux20L/min
Ambient Temperature Range5~35℃
Circulating Fluid20~90℃:Water
ConnectorG3/4
Overall Dimensions600*800*1035
Input Power3Ph,380V,50Hz
Overall Power5.5kw
Net Weight90kg
Design StandardCE



Temperature control unit performance curve

——



Product Effect Diagram

——




Areas of Application

——







Tags

Previous:CRS Series-1002024-02-26
Next:HPS Series-0802024-02-26
  • 菜单

Contact

Manager Hong:+86 15298871053

Company Phone:+86 400-600-7626

Company Email: lingheng@liat.cn

Company website: www.liat.cn

Address:No.178,Puhui Road,Jiuting Town,Songjiang District,Shanghai,China.

Factory Address: Building 6, No. 208, Changqing Road, Wujiang District, Suzhou, China

   WeChat

Copyright © LIAT Ultra-low temperature chiller All rights reserved record number:Shanghai ICP 2022033643-1 Mainly engaged inLithium battery testing chiller,semiconductor Chiller, ultra pure water online heater, Welcome to inquire!
Technical Support: Xiang Yun Platform Disclaimers