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CRD Series-070

CRD Series-070

  • Category:Multi-channel Semiconductor Manufacturing
  • Sector:Suitable for multiple semiconductor manufacturing processes such as CVD, PVD, ETCH, etc.
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  • Release time:2024-01-01
  • Detail

Product Description

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The CRD series system consists of circulation pumps, compressors, heaters, and so on.


Control Function

Heating mode: controlled by PID, the heater starts and the regulation curve is shown below.



Refrigeration mode: PID control is adopted, the compressor starts in the refrigeration mode, and the bypass valve assists in regulating to realize stable temperature control.

Compressor: Adopting high energy-efficiency Haili rotary sub hermetic compressor, with its own gas-liquid separator, able to separate gas and liquid during operation, play a role in preventing compressor liquid shock, to ensure the long-term service life of the product, high efficiency and reliable operation, low noise. Compressor can work under any load work, can realize rapid cooling.

Condenser: The air-cooled type adopts anti-corrosion micro-channel heat exchanger inside, which is small, stable and easy to maintain. Water-cooled type adopts high-efficiency plate heat exchanger with high heat exchange efficiency.

Evaporator: High-efficiency plate heat exchanger, internal optimized circulation circuit, high heat exchange efficiency.

Heater: The use of submerged heaters allows heat to be transmitted directly to the circulating fluid, with high and more uniform heating efficiency.

Expansion valve: electronic expansion valve to realize the condenser to the evaporator throttling, and at the same time control the flow of refrigerant, to ensure that the evaporator outlet refrigerant vapor superheat stability, electronic expansion valve high precision and fast response speed, so as to achieve the evaporator and good liquid supply.

Circulation pump: the use of centrifugal pumps with high energy efficiency and low noise during operation, to achieve stable delivery of circulating fluid.


Other Functions

Display: 7-inch screen, easy to view data settings, you can monitor the operating status. View temperature curve, pressure curve, historical alarms, flow parameters and other data.

Flow meter: monitor the flow value, make the temperature control more stable, at the same time play the role of energy saving and environmental protection.

Resistivity Sensor: Monitoring the resistivity of the coolant allows the presence of impurities to be detected in time for appropriate measures to be taken.


Intelligent Control System

Adopting advanced PLC programmable controller, applying PID algorithm to realize precise temperature control of circulating liquid, which makes the temperature control precision higher. Touch screen human-computer interaction interface, Chinese interface, clear description of parameters, fault records can be checked, real-time temperature trend line, convenient for users to observe and easy to operate. The operation interface can be customized according to the user's needs, such as bilingual interface.

 The communication adopts the standard RS485 interface, following the standard Modbus-RTU protocol, which can transmit all kinds of data required by the user, such as the temperature of the liquid discharged, the unit failure and other information (the interface can be customized according to the customer's requirements).



Technical Parameters

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CRD series product parameters
Pseudolaric AcidChiller
Product ModelCRD070-W-23
Cooling capacity(W)@-20°CUpper channel 1000W; lower channel 1000W
Temperature Range-20℃~+80℃
Ambient Temperature Range5℃~35℃
Input Power3Ph,208-240V,50-60Hz
Flux20L/min
Temperature control accuracy土0.1
Refrigerant Carrier (chemistry)R404A
ConnectorG1/2
Machine Size600W*950D*1400H
Design StandardCE(SEMI S2 Selectable)
Net Weight(kg)120kg
Total Power11KW


Temperature control unit performance curve

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Product Effect Diagram

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Areas of application

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Previous:CRS Series-0652024-02-26
Next:CRS Series-1002024-02-26
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Contact

Manager Hong:+86 15298871053

Company Phone:+86 400-600-7626

Company Email: lingheng@liat.cn

Company website: www.liat.cn

Address:No.178,Puhui Road,Jiuting Town,Songjiang District,Shanghai,China.

Factory Address: Building 6, No. 208, Changqing Road, Wujiang District, Suzhou, China

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