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CRS Series-100

CRS Series-100

  • Category:Chip Triple Temperature Test
  • Sector:Suitable for multiple semiconductor manufacturing processes such as CVD, PVD, ETCH, etc.
  • Browse number:
  • Release time:2024-01-01
  • Detail

Product Description

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CRS series system consists of inverter circulating pump, inverter refrigeration circuit, heater and so on.


Control Function

Variable Frequency Pump: The frequency of the variable frequency pump is controlled by the flow rate and the pressure can be set on the touch screen.

Heating function: controlled by PID, the regulation curve in heating mode is shown below.



Refrigeration mode: PID control is adopted, the compressor starts in the refrigeration mode, and the frequency converter adjusts the frequency of the compressor and the water pump to realize stable temperature control.

Liquid injection cooling valve control: PID control is used to stabilize the compressor discharge temperature and adjust the differential pressure to achieve stable operation of the compressor.

Emergency stop button: stops equipment operation and alarms.

When the circulating fluid level is high: only alarm but not stop heating and cooling.

When the circulating fluid level is low: alarm and stop heating and cooling.

Leakage: Alarm and stop all equipment.

Over-temperature protection: alarm and stop heating when the temperature of circulating liquid in the water tank is higher than the set value.

Failure of water pump inverter: alarm and stop all equipment.

Compressor inverter failure: alarm and stop the refrigeration system operation, compressor stop operation and close the liquid injection valve, refrigeration valve and hot gas bypass valve.

Compressor internal over-temperature protection: alarm, and stop the refrigeration system operation, compressor stops running and close the electronic expansion valve.

Failure of the electronic expansion valve: The compressor stops and closes the electronic expansion valve.

Compressor return pressure: Pre-alarm when the pressure is lower than the alarm value, fault when lower than the protection value, and stop the refrigeration system.

Compressor discharge pressure: Pre-alarm when the pressure is lower than the alarm value, fault when lower than the protection value, and stop the refrigeration system.


Other Functions

Operation curve monitoring: Open the operation monitoring in the menu to observe the curve graph of temperature control, high and low voltage and other parameters.

Circulating fluid recovery: Open the recovery solenoid valve and use nitrogen to purge and recover the circulating fluid.


Intelligent Control System

Adopting stable PLC control: applying PID algorithm in order to realize the precise control of circulating liquid temperature, which makes the temperature control precision higher. Touch screen human-computer interaction interface, convenient for users to observe and operate. Other language operation interface can be customized according to users' needs.

Communication adopts: standard RS485 interface, following the standard Modbus-RTU protocol, according to the user's needs, the transmission of all kinds of data required, such as the temperature of the liquid out of the unit, unit failure and other information.


Technical Parameters

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CRS Series Parameters
Pseudolaric AcidChiller
Product ModelCRS100-W-32F
Cooling MethodWater-cooled Refrigerated
Control MethodPID control
Temperature Control Accuracy(℃)土0.1℃
Cooling Capacity(kw)10(20℃)
Heating Capacity (kw)2.4
Flux20L/min(0.72Mpa)
Ambient temperature range (°C)5~35℃
Circulating Fluid-20~40℃:Fluorinert
FC-3283/GALDEN® HT135
20~90℃:Fluorinert
FC-40/GALDEN® HT20
RefrigerantsR404A
ConnectorRC3/4
Overall Dimensions(mm)380W×870D×1300H
Input Power3PH,208-240V AC,50HZ
Power of the whole machine(kw)9
Net weight (kg)180
Design StandardSEMI



Temperature control unit performance curve

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Product Effect Diagram

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Areas of application

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Contact

Manager Hong:+86 15298871053

Company Phone:+86 400-600-7626

Company Email: lingheng@liat.cn

Company website: www.liat.cn

Address:No.178,Puhui Road,Jiuting Town,Songjiang District,Shanghai,China.

Factory Address: Building 6, No. 208, Changqing Road, Wujiang District, Suzhou, China

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